Controller Software

eInnoSys is the first company in the industry to successfully implement the entire etch equipment controller software in Android. The dry etch equipment, which is a redesign of Matrix System One is controlled by an Android tablet attached to the equipment.


  • Full-featured equipment controller software with precise control of temperature, pressure, MFCs and RF
  • Integrated robot handler and cassette indexer
  • All other features of a controller software, such as recipe editor, user administration, process & transport maintenance capabilities, etc
For more information and pricing click here