Einnosys software engineers are experts at the latest technologies, such as Big Data, IoT (Internet of Things) and AI (Artificial Intelligence). Combining these technologies with conventional APC projects offers more innovative solutions and much better results to our customers.
Run-to-Run (R2R) control and Wafer-toWafer (W2W) control
Analyze data and take appropriate actions, including stop feeding, if needed, during wafer unload & load
Feedback System
- Feeding overlay measurement into steppers
- Improved yield, cycle time & OEE
- Better process
Feeding other metrology results into process steps
- Grinders
- Polishers
Case Study:
At a wafer fab, our APC project resulted in a cost savings of hiring additional engineer, with annual savings of $120-160K
At another wafer fab, our advanced process control resulted in a yield
improvement of 0.5%