What is SECS/GEM?
SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) is communication interface protocols for communication between semiconductor equipment and a fab host. Fab host is a software application that is controlling and monitors equipment processing using SECS/GEM protocol.
SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products, and change variables. With SECS/GEM, all this can be performed in a standard way.
SECS/GEM protocol has been standardized by the non-profit association SEMI (Semiconductor Equipment and Materials International). semi.org to learn more about SEMI standards and SECS/GEM protocol. This tutorial is aimed at providing an introduction or overview of the SECS/GEM basics to an entry-level or intermediate person in the semiconductor manufacturing industry only.
The detailed SEMI standards it contains are not meant to replace all other comprehensive works. For complete standards, please refer to SEMI. Even though this guide breaks down the ideas, creation of a SECS/GEM driver from scratch is difficult and expensive. It’s crucial to cut costs while enhancing productivity because other things in life have to go on at the same time.
Key Components of SECS/GEM:
SECS (SEMI Equipment Communication Standard):
- Defines the protocols and message formats for communication between host systems and equipment.
- Includes SECS-I (RS-232 based) and HSMS (High-Speed SECS Message Services, TCP/IP based).
GEM (Generic Equipment Model):
- Provides a standard way to control and monitor semiconductor manufacturing equipment.
- Defines a model for equipment behavior, status reporting, and data collection.
Applications of SECS/GEM:
Semiconductor Manufacturing:
- Widely used in the semiconductor industry for wafer fabrication, testing, and packaging.
- Ensures precise control and monitoring of complex manufacturing processes.
Electronics Manufacturing:
- Applied in the production of electronic components and assemblies.
- Enhances the integration and automation of assembly lines.
Pharmaceutical and Biotech Industries:
- Used for equipment communication and control in the production of pharmaceuticals and biotechnology products.
- Ensures compliance with regulatory standards and quality control.
How do our SECS/GEM standard services help?
Communication defines the behavior of the equipment regarding the presence or absence of a communication link with the host. It also specifies how to establish or resume communication with S1F13/S1F14 when it is cut off. Using our SECS/GEM Software, the host can have an easy communication process.
EInnosys CONTROL state model in SECS/GEM protocol specifies the degree of collaboration between the host and the equipment. The CONTROL paradigm offers the host three fundamental degrees of host control that establish the host’s capacity to command the apparatus:
- OFFLINE (Lowest Level): The operator working in the operator console manually operates the entire equipment. The equipment will reply with an SxF0 to any direct message from the host other than S1F13 or S1F17; the equipment will reply with an SxF0.
- LOCAL/ONLINE (Middle Level): The Host is only permitted to carry out “read-only” operations in this state, such as data collecting. The host cannot change equipment constants that impact processes, remote commands that result in motion, or processing-initiating commands.
- Online/Remote: The highest level of operation is ONLINE/REMOTE, in which case the host is free to use the equipment to the fullest extent possible using the communications interface.
The equipment method, technology, and design all play a significant role in the PROCESSING state model. However, it is anticipated that these models will share some characteristics.
eInnosys Equipment can be given instructions from the host to carry out an automatic task. For instance, START, STOP, PAUSE, etc. The aforementioned command is comparable to the operator’s manual action on the console.
There are three different types of variables:
- Status Variable: This equipment-defined global variable is “read-only”. The apparatus updates the relevant status variable every time processing occurs to reflect the most recent information. For instance: an incremental counter, the present or past condition, etc.
- Equipment Constant: This is a global variable that can be read and written. Using the right techniques and formulas, the host can modify the constant equipment variables, impacting the settings and ultimately altering how the equipment behaves.
- Continuous Variable: This variable is “local” and only exists in collection events.
- The user can use the S1F3 command to request a collection of status variable values.
- The S2F13 command helps to obtain a list of equipment constant values.
- A report that includes status variables and data variables can be defined by the host and attached to a collection event. The report comprising the values of those variables is sent simultaneously when the equipment raises the event (using the S6F11 instruction).
- The host can provide traces that will periodically sample the status variable data.
- Utilizing alarm notifications to increase data gathering through collection events is another option. Whenever an alert occurs or is cleared, per standard, an event needs a transmission to the host.
Each equipment supplier needs to offer a GEM Interface Reference Manual per the SECS/GEM standard. A list of status variables, equipment constants, alarms, collection events, etc., that are defined or supported by the equipment is required, as well as a GEM Compliance declaration and complete SECS-II message documentation. EInnosys secs/gem simulator helps to stimulate equipment or the factory depending on the use case and communication.
With this function’s aid, the equipment can alert the host whenever an alarm or fault on the equipment occurs or is resolved. Alarms are unusual, unwelcome events that put people, property, or processed physical materials in danger.
Benefits of SECS/GEM Integration
Improved Equipment Performance
One of the primary benefits of SECS/GEM integration is the significant improvement in equipment performance. SECS/GEM allows for real-time monitoring and control of equipment, enabling quick adjustments to process parameters. This real-time capability ensures that equipment operates at optimal conditions, reducing downtime and improving overall efficiency.
Enhanced Data Collection and Analysis
SECS/GEM facilitates comprehensive data collection from various equipment components. This data can be analyzed to identify trends, predict equipment failures, and optimize maintenance schedules. By leveraging the power of data analytics, manufacturers can make informed decisions, improve process quality, and reduce operational costs.
Increased Automation and Efficiency
Automation is a key driver of efficiency in manufacturing. SECS/GEM integration enables greater automation by allowing equipment to communicate seamlessly with factory control systems. This integration supports automated recipe management, equipment diagnostics, and process control, leading to reduced manual intervention, faster production cycles, and higher throughput.
Improved Equipment Utilization
With SECS/GEM, manufacturers can monitor equipment utilization in real-time, identifying underutilized assets and optimizing production schedules. This capability ensures that all equipment is used to its fullest potential, maximizing return on investment and minimizing idle time.
Enhanced Process Control
SECS/GEM provides granular control over manufacturing processes. Operators can remotely adjust process parameters, initiate diagnostics, and perform maintenance tasks without physically interacting with the equipment. This level of control enhances process stability, reduces variability, and improves product quality.
How to Implement SECS/GEM Integration
Assessing Your Current Systems
Before implementing SECS/GEM, it is essential to assess your current manufacturing systems and equipment. Identify which equipment supports SECS/GEM protocols and determine the extent of integration required. This assessment will help you plan the implementation process effectively.
Choosing the Right SECS/GEM Solution
There are various SECS/GEM solutions available in the market, ranging from software libraries to complete integration platforms. Choose a solution that aligns with your specific requirements, budget, and existing infrastructure. Consider factors such as ease of integration, scalability, and support for future upgrades.
Testing and Validation
Once the integration is complete, conduct thorough testing to ensure that the SECS/GEM implementation is functioning as expected. Validate the communication between equipment and host systems, and verify that data exchange is accurate and reliable. Address any issues promptly to avoid disruptions in production.
Planning the Integration Process
Successful SECS/GEM integration requires careful planning and execution. Develop a detailed integration plan outlining the steps, timelines, and resources needed. Ensure that your team is trained on SECS/GEM protocols and familiar with the chosen solution. Collaboration with equipment vendors and SECS/GEM experts can also facilitate a smooth integration process.
Continuous Monitoring and Improvement
SECS/GEM integration is not a one-time task. Continuous monitoring and improvement are essential to maintain optimal performance. Regularly review equipment data, identify areas for improvement, and update your SECS/GEM implementation as needed. Staying proactive will help you reap the long-term benefits of SECS/GEM integration.
Equipment used for working on SEMI E30 GEM Standard
Tools must implement a minimal subset of all the capabilities listed in the E30 standard to comply with basic GEM requirements. EInnosys’ tool ideally supports remote control, data publication, and complete process management. Some functions, such as spooling (which stores tool messages for later delivery when communication between the host and the tool is down) or limitations monitoring, are less frequently requested (a simple piece of SPC-like analysis reported by the equipment). Our SECS/GEM connectivity devices offer full compliance for every capability stated in the SEMI E30 standard, regardless of what a specific fab asks your tools to support.
In simple words, the SECS/GEM standard defines messages, state machines, and scenarios to enable factory host applications to control as well as monitor manufacturing equipment. GEM standard is officially designated as SEMI standard E30 but is frequently referred to as the GEM or SECS/GEM standard. The GEM is beneficial for both device manufacturers and equipment suppliers as it defines a common set of equipment behavior and communication capabilities to provide functionality as well as the flexibility to support manufacturing. Since the GEM standard has only a few semiconductor-specific features, it has been adopted by other manufacturing industries as well, such as PV.
SEMI Standards:
SEMI E30
Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E5
Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E37
Specification for High-Speed SECS Message Services (HSMS) Generic Services
SEMI E4
Specification for High-Speed SECS Message Services (HSMS) Generic Services
SEMI E30: SECS/GEM Standard Overview
1. SECS (SEMI Equipment Communications Standard): SECS defines the structure of messages and the communication process between equipment and the host system.
2. Communication Process:
- Establishment of communication is done via S1F13/S1F14 messages
- Handshaking between the equipment and host uses S1F1/S1F2 messages.
Communication State: The equipment contains various communication state information regarding the connection in SEMI.
- 0: Disable
- 260: Communicating
- 273: Waiting for connection request (CR) from host
- 274: Waiting due to a delay
3. Control State: Control states define the operational mode of the equipment:
- Equipment Offline: Equipment not communicating with the host.
- Attempt Online: Equipment attempting to establish a connection with the host.
- Host Offline: Host system is unavailable.
- Online Local: Equipment is online but controlled locally.
- Online Remote: Equipment is online and fully controlled by the host system
4. Processing State: Processing states indicate the current operation of the equipment:
- Idle: Equipment is idle and not processing.
- Init: Equipment is initializing.
- Executing: Equipment is processing tasks.
- Pause: Equipment processing is paused.
5. Remote Commands: The host can send remote commands to equipment using S2F41 messages to perform specific operations. Examples include:
- PP-SELECT: Recipe selection command.
- START: Start the processing operation.
- STOP: Stop the processing operation.
- PAUSE: Pause the processing operation.
Data Collection in SECS/GEM
Status Variables:
Collected using S1F3 messages.
A request is sent to the equipment to report specific values of its status.
Data Variables:
Collected using S1F21 messages.
The host requests basic information about the data variables available in the equipment.
Equipment Constants:
Collected using S2F13 message.
Some values that change infrequently can be retrieved using this message.
Additionally, the host can set a trace function to enable the equipment to automatically send data without requiring specific host requests.
Event Management in SECS/GEM
- Event reports are configured using S2F33 and S2F35 messages.
- When an event occurs, the equipment sends a notification along with relevant data to the host.
The SEMI E30 (SECS/GEM) standard is essential for enabling communication and automation in semiconductor manufacturing. By defining robust communication protocols, equipment control states, data collection mechanisms, and event management processes, SECS/GEM ensures seamless integration between equipment and host systems.
Its implementation drives greater efficiency, precision, and automation in modern semiconductor fabs.
SEMI E5 SECS-II Message
Stream ID (Sx):
Example: S1 indicates Stream 1, which deals with basic equipment and communication messages.
Function ID (Fy):
Odd Function ID (e.g., F13): Represents a Primary message (request).
Even Function ID (e.g., F14): Represents a Secondary/Reply message (response).
Mnemonic:
Example: "ECR" (Establish Communication Request).
Message Block Type:
M (Multi-block): Message requires multiple blocks to transmit.
Message Direction:
H→E: Host to Equipment.
E→H: Equipment to Host.
H↔E: Bi-directional communication.
SEMI E37 HSMS
SEMI E37 HSMS (High-Speed SECS Message Service) Communication
- HSMS (Socket): Communication is performed over TCP/IP sockets.
- SECS-I (Serial Communication): Communication is established through serial ports (e.g., RS232, RS485).
2. Device ID:
- Both the Host and Equipment must have the same Device ID for communication to be established.
3. Connection Mode:
- Passive Mode: The Passive entity starts first and listens for incoming connections.
- Active Mode: The Active initiates the connection after the Passive entity is ready.
4. Port:
- Communication requires matching port numbers:
- Local Port: Port on the initiating device (e.g., 4967).
- Remote Port: Port on the target device (e.g., 4968).
- Example: If the Host Local Port is 4967, the Equipment Remote Port must also be 4967.
5. Port ID:
- For Serial Communication, the COM port (e.g., COM1) is used for communication
6. Timeouts
- Several timeout settings ensure proper communication timing:
- T1 to T8 are defined as follows:
- T1: Timeout for sending/receiving messages (e.g., 500 ms).
- T2: Maximum interval between consecutive messages (e.g., 10,000 ms).
- T3 to T8: Configurations for other specific timeouts.
- T1 to T8 are defined as follows:
Message Format:
- Header: First 14 bytes of the message contain header information. (4 Byte message information + 10 byte Header Information)
- Message Body: The data portion follows the header.
Communication Flow:
After establishing a connection, the two entities initiate HSMS communication using the Select procedure. Once communication is active, data messages can be exchanged in either direction at any time. To terminate HSMS communication, the entities use the Deselect or Separate procedure.
- Select Request: The initiator begins the select procedure by sending a Select.req message to the responding entity.
- Select Response: If the responding entity can accept the request, it replies with a Select.rsp message containing a Select Status value of 0.
- Deselect Request: The initiator begins the deselect procedure by sending a Deselect.req message to the responding entity.
- Deselect Response: If the responding entity is in the SELECTED state and can permit the deselect, it responds with a Deselect.rsp message containing a response code of 0.
Configuration Types:
- Defines three types of variables as per the SEMI standard:
- Status Variable: Provides the status of equipment.
- Data Variable: Contains operational data.
- Equipment Constant: Configuration constants for the equipment.
2. Events Map:
- Specifies all events to be monitored.
- When an event occurs, the Equipment sends it to the Host.
3. Alarms Map:
- Specifies all alarms to be monitored
- When an alarm occurs, the Equipment notifies the Host.
Purpose of the Configuration:
Among the capabilities offered by the SECS/GEM standard is –
- For a fab host to start and stop processing
- For a fab host to select, download, and upload recipes from/to the equipment
- For a fab host to query the equipment for values of various process parameters and equipment configuration
- For a fab host to set equipment configuration parameter values
- For equipment to send alarms to the fab host
- For a fab host to define reports of various variables and associate them with events such as lot start or
wafer complete - For equipment to send various events and associated reports to the fab host
Since SECS/GEM is a communication protocol, it is platform and technology as well as programming language independent. The host side of a connection is executing on a computer system provided by the factory, and the equipment side of a connection is running on a controller computer provided by the equipment manufacturer. This gives both – the fab as well as the equipment manufacturer interoperability, flexibility, and platform independence. Both, the fab and the OEM can develop their software application without having to worry about communication compatibility, as long as both of them are adhering to SECS/GEM standards.
Best Offers for SECS/GEM Software Solutions
eInnoSys provides comprehensive SECS/GEM software solutions tailored for both equipment manufacturers (OEMs) and factories (FABs or ATMs).
EIGEMBox: A plug-and-play software designed for seamless integration with equipment controller software. By using EIGEMBox, OEMs can significantly reduce the time and cost required to make their equipment SECS/GEM compliant.
EIGEMEquipment: A SEMI standards-compliant SECS/GEM software that integrates quickly into various semiconductor equipment, including Wafer Processing, Metrology, Assembly, Packaging, and Test equipment, saving months of development time and expenses.
EIGEMHost: A SECS/GEM software solution for FABs and ATMs, enabling efficient communication between the factory host and different equipment.
EIGEMSim: A versatile simulator software for SECS/GEM testing. It can be configured as either a host or equipment to validate SECS/GEM communication effectively.
Frequently Asked Questions (FAQs)
SECS/GEM is a standard communication protocol used in the semiconductor and electronics manufacturing industries. It enables factory host systems to communicate with equipment, allowing for automation.
SECS stands for SEMI Equipment Communication Standard. It is a set of protocols defining how equipment exchanges data with factory host systems.
GEM stands for Generic Equipment Model. It provides a standardized way for equipment to support automation and monitoring features.
SECS/GEM is widely used in semiconductor manufacturing because it enables:
- Automated control
- Data collection
- Remote monitoring
- Process optimization
This reduces manual intervention and improves production efficiency.
- SECS-I (SEMI E4): A low-level communication protocol that defines how messages are transmitted over RS-232 or TCP/IP.
- HSMS (High-Speed SECS Message Services, SEMI E37): A modern replacement for SECS-I that uses TCP/IP for faster communication.
- GEM (SEMI E30): Defines standard behaviors and messages for equipment to support automation.
SECS/GEM messages are exchanged in a structured format and include:
- S1 (Equipment Status Messages) – Identify equipment, model, and status.
- S2 (Process Program Management) – Send and receive recipes and process commands.
- S5 (Alarms & Events) – Report alarms and notify changes in equipment state.
- S6 (Data Collection) – Collect process data and provide real-time reporting.
- S7 (Process Program Management) – Manage and transfer process recipes.
- SECS-I uses RS-232 serial communication (slow, point-to-point).
- HSMS uses TCP/IP (faster, supports multiple connections).
A GEM interface is an implementation of the SECS/GEM standard on a piece of manufacturing equipment, allowing communication with factory control systems.
GEM provides automation functions such as:
- Equipment identification and configuration.
- Alarm and event notification.
- Remote command execution.
- Process monitoring and data collection.
SECS/GEM is primarily used in semiconductor fabrication (fabs) but is also used in electronics manufacturing, PCB assembly, and display panel production.
Common programming languages include:
- C/C++ (for low-level communication).
- Java & Python (for higher-level automation).
- .NET (C#) (for integration with industrial control systems).
Testing is done using SECS/GEM simulators and protocol analyzers that can send and receive messages between the host and the equipment.
Yes, SECS/GEM can integrate with IIoT (Industrial IoT) platforms and data analytics solutions using middleware or API-based integration.
- Legacy equipment may not support GEM. (Yes! Einnosys offers customized solutions for legacy equipment that does not support GEM. We also provide various versions of GEM tailored to meet unique requirements and deliver optimal automation solutions.)
- Customization may be required for different manufacturers.
- Initial setup and validation require expertise.