SECS(SEMI设备通信标准)和GEM(通信和制造设备控制的通用模型)标准是由半导体制造商的国际组织SEMI.org发布和维护的。SEMI.org是管理半导体制造标准的组织机构。 它是(最初)半导体/电子行业自动化中使用的主要通信协议,但是今天,它已被光伏和SMT行业广泛采用。 它提供设备与主机系统之间的通信接口。 与其他通信协议(如PLC)不同,它使来自不同供应商的设备能够使用标准且一致的协议与各种类型的主机系统进行通信。 要了解SECS / GEM标准,您需要从SEMI购买以下3个基本标准: SEMI E30 GEM标准-这是“大脑”,用于定义设备(业务规则),状态机以及某些规则(例如应使用SECS-II消息,在什么情况下以及应该进行什么活动)的规则。它还定义了诸如状态数据收集,跟踪数据收集,警报管理,假脱机,远程命令等功能。 SEMI E5 SECS-II-定义在主机设备之间交换的消息(API)解释的详细信息。它还定义了消息输入/输出数据结构,数据项格式,确认代码等。 SEMI E37 HSMS-高速SECS消息服务。这是一个基于TCP / IP协议的传输层,它是先前基于串行通信的SEMI E4 SECS-I标准的后续版本。这也是将SECS-II消息编码为HSMS消息格式的层。
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