EIRMS – Recipe Management System workflow
EIRMS offers following benefits out of the box –
Ensures all lots are processed with most upto-date version of production released recipe
Saves engineering time in recipe management including copying recipes from one equipment to the others
Maintains audit trail of all recipes along with version control
Takes periodic backups of recipes
Works on most equipment types
Partial list of Toolsets:
Canon i5+, i5 and i4 steppers
Matrix System One dry etch
SPEC wet bench
IVS overlay metrology
Ultratech wafer topography & stress measurement metrology equipment
Related Fab Automation Software Products
Recipe Management System FAQs
Recipe Management System FAQs
Q: What is a Recipe Management System?
A: A Recipe Management System is a tool designed to manage, monitor, and ensure the accuracy of recipes used in semiconductor manufacturing. It helps fabs and ATM facilities (assembly, test, and packaging) improve yield, OEE (Overall Equipment Effectiveness), and engineering efficiencies.
Q: How does a Recipe Management System improve yield and efficiency?
A: By ensuring that production lots always run with the correct version of the recipe, the system reduces errors, optimizes machine performance, and minimizes downtime.
Q: Is the Recipe Management System compatible with all equipment?
A: Yes, it works with any equipment that has SECS/GEM capability. Custom solutions can also be developed for non-SECS/GEM-capable equipment.
Q: What is SECS/GEM, and why is it important for Recipe Management Systems?
A: SECS (SEMI Equipment Communication Standard) and GEM (Generic Equipment Model) are protocols that enable seamless communication between manufacturing equipment and host systems. These protocols are essential for automation and efficient recipe management.
Q: How does the Recipe Management System ensure recipe accuracy?
A: It verifies the recipe version against the production lot requirements and ensures the correct recipe is used at all times, reducing the risk of human error.
Q: Can the system handle multiple equipment types in a fab?
A: Yes, the system is designed to support all equipment types, ensuring a centralized and streamlined recipe management process.
Q: How does the system save engineering time?
A: By automating recipe updates, validations, and version control, the system saves weeks’ worth of engineering time annually that would otherwise be spent on manual adjustments and monitoring.
Q: What data does the Recipe Management System collect?
A: RMS collects data like all recipes with particular version and modified date and User who uploaded or downloded version.
Q: Can the system integrate with existing MES or factoryHost or StationController?
A: Yes, the Recipe Management System can be integrated with MES or factoryHost or StationController to ensure seamless operation and data flow across the manufacturing process.
Q: Is the system scalable for large fabs or multi-site operations?
A: Absolutely. The system is designed to handle large-scale and multi-site operations, ensuring consistent recipe management across all locations.
Q: What are the benefits of implementing a Recipe Management System?
A: Key benefits include improved yield, reduced cycle time, enhanced OEE, consistent recipe execution, reduced human error, and significant time savings for engineering teams.
Q: How does the system handle recipe version control?
A: The system maintains a version history of all recipes and ensures that only the approved version is deployed during production, with updates tracked and recorded.
Q: How is the Recipe Management System deployed?
A: Deployment involves integrating the system with the fab’s equipment and host systems, configuring recipes, and training operators and engineers on its use.
Q: Can the system provide real-time monitoring?
A: Yes, it offers real-time monitoring of recipe execution and equipment status to ensure smooth operations.
Q: How does the system handle recipe security?
A: The system includes different user roles with three specific user types: Admin, Engineer, and Operator. For tasks like recipe upload, download, or version changes, only Admin or Engineer level users have access. Admin’s Approval is needed for any recipe to download into Equipment.
Q: What industries can benefit from a Recipe Management System?
A: It is primarily used in semiconductor manufacturing but can also benefit other industries requiring precise recipe or process control, such as pharmaceuticals and electronics assembly.