EIRMS – Recipe Management System workflow
EIRMS offers following benefits out of the box –
Ensures all lots are processed with most upto-date version of production released recipe
Saves engineering time in recipe management including copying recipes from one equipment to the others
Maintains audit trail of all recipes along with version control
Takes periodic backups of recipes
Works on most equipment types
Partial list of Toolsets:
Canon i5+, i5 and i4 steppers
Matrix System One dry etch
SPEC wet bench
IVS overlay metrology
Ultratech wafer topography & stress measurement metrology equipment