In addition to implementing complex yield improvement projects, our staff has published technical papers on how to use innovative, out-of-the-box automation to improve yield in factories
Yield Improvement Solutions
Add SECS/GEM on Old/Legacy Equipment Through EIGEMBox
Add SECS/GEM (automation) capability on existing or legacy equipment through our patent-pending product EIGEMBox
Advanced process Control (APC)
With Decades of Fab & Assembly operations experience, EINNOSYS has developed various APC solutions to collect & analyze metrology data & adjust process recipe and parameters automatically
Fault Detection & Classification
eInnoSys has successfully implemented several Fault Detection & Classification (FDC) projects at various fabs.
Case Studies
A Taiwan based fab saw yield improvement by 2% by using EIGEMBox for automation of Legacy Equipment
Prevented misprocessing of up to 100 wafers quarterly by analyzing metrology data and adjusting process recipes
At one wafer fab, eInnoSys implemented Fault Detection and Classification (FDC) system with cost savings of $120k per year
Yield Management Solutions
Host applications or station controllers that download and/or select recipes upon barcode or RFID scanning of lot boxes and remotely starting process
Collection and analysis of alarms, events and other critical process parameters from equipment through SECS/GEM or other means and correlating with other data such as that from MES or from other equipment
For Wafer FABs, correlating end-to-end wafer data: From epitaxial - inline process - inline metrology - electrical testing -Final Test