Successfully Implemented on 80+ FAB & ATP Equipment Worldwide
Fully SEMI E30, E37, E5, E4, E23, E39, E40, E84, E87, E90, E94 & E116 complaint.
Saves Millions in Equipment upgrade cost.
Little downtime – Only a few hours of equipment downtime over a few weeks needed.
Huge saving in engineering time – No need to re-qualify recipes as no change to equipment.
Enables remote diagnostics, saves hundreds of hours of engineering time each year.
Saves thousands in additional software license cost – auto save wafer maps or other charts from equipment screen.
Equipment Upgraded with EIGEMBox
This is a partial list of equipment that has been upgraded For SECS/GEM using EIGEMBox For a Complete list Contact Us.
Partial Equipment List - FAB
- KLA Surfscan
- Varian 3290
- Takatori
- Ebara
- Plasma Therm
- MRC Eclipse
- KLA Therma-wave
- Sidea PT-903
- CDE Resmap
- Accretech PG300RM
- TEL Alpha 8 SE
- ASM E2000
- SPTS
- Hitachi M-511AE
Partial Equipment List - Assembly & Packaging
- Disco 651/641
- Blue M Oven
- Towa Y1
- Asterion
- Budatec
- Orthodyne
- Essentec Fox & Paraguda
- Takatori ATM 8200A
- ASM AD898
- Ismeca SL
- Hexa Max
- Centrotherm CP6202
EIGEMBox Overview
EIGEMBox is a plug-and-play solution that adds SECS/GEM, Modbus, or OPC capability to legacy semiconductor equipment—without any software or hardware installation on the tool itself. By simply connecting the equipment’s display cable (VGA, DVI, or HDMI) and optionally the keyboard/mouse ports (USB or PS/2), EIGEMBox enables full host communication and remote control. It has been successfully used in various scenarios, including enhancing SECS/GEM communication with full parameter exchange and reduced latency, enabling AMHS (E84/E87) integration in 200MM fabs, and extracting non-standard data beyond traditional SECS/GEM limitations to support advanced monitoring and automation.
Watch how EIGEMBox simplifies SECS/GEM integration and accelerates smart factory adoption.
Key Features of EIGEMBox
Full SECS/GEM Compliance
Supports SEMI E30, GEM300, and E84/E87 for seamless equipment integration.
Plug-and-Play Setup
No equipment changes needed. Quick setup in minutes using EIGEMBox.
Real-Time Monitoring & Control
Live data collection, remote start/stop, and automated recipe management.
Advanced Data Extraction
Captures wafer maps, trends, and screen data for better insights.
Why Choose EIGEMBox
Zero-Risk Deployment
Non-intrusive setup with no impact on equipment performance or warranty.
Proven on 80+ Tools
Successfully used across multiple semiconductor equipment types.
No OEM Dependency
No licenses, upgrades, or OEM support required.
Fast Deployment
Install in minutes. Get data instantly.
Cost-Effective Solution
Avoid expensive replacements. Extend equipment life with SECS/GEM integration.
Upgrade legacy tools with full SECS/GEM and GEM300 compliance
Upgrade Legacy Equipment with SECS/GEM and GEM300 Compliance Modernize semiconductor tools and enable seamless factory automation and equipment connectivity.
Cost Savings & Extended Asset Life
Avoid costly upgrades ($200K–$1M+). Extend equipment life by 5–10+ years at a lower cost.
Faster Industry 4.0 Adoption
Enable real-time monitoring, predictive maintenance, and automation in weeks—not years.
Improved Productivity & Quality
Reduce manual errors, speed up processes, and improve OEE by 5–15%.
Zero-Risk Operation
No impact on equipment performance. No crashes, no delays, no warranty issues.
Supported
SEMI E30
Complete implementation including equipment constants, status variables, collection events, alarms, remote commands, process programs, terminal services, and trace data collection.
SEMI E84
Full E84 protocol for AMHS integration, enabling automated load port communication, carrier presence detection, placement verification, and access mode control.
SEMI E87
Carrier ID reading, substrate location data, slot map management, and carrier association for complete substrate tracking and automated material handling.
SEMI E94
Control job management for substrate processing tracking and material movement commands, integrating legacy equipment into modern MES workflows.
SEMI E40
SEMI E40 is a SEMI standard that defines the Process Job Management (PJM) model for semiconductor manufacturing equipment. It enables standardized creation, control, execution, and tracking of process jobs, improving automation, traceability, and integration between equipment and factory host systems.
SEMI E37 (SECS-II)
Defines the structure and format of messages for communication between semiconductor equipment and host systems.
SEMI E5 (SECS-I)
Defines a serial communication protocol for data exchange between semiconductor equipment and host systems.
SEMI E4
Defines the physical interface and electrical specifications for serial communication between semiconductor equipment and host systems.
SEMI E23
Defines a standard notation for representing and documenting SECS-II messages in a human-readable format.
SEMI E39
Defines an object-based model for organizing and accessing semiconductor equipment data and services.
SEMI E90
Defines substrate (wafer/carrier) tracking within semiconductor equipment.
SEMI E116
Defines methods for tracking and reporting semiconductor equipment performance metrics.
Schedule a Technical Consultation
Connect with our experts to discuss your OEM and FAB/ATP requirements and explore the right solution for your operations.
Case Studies
Fast, Flexible & Reliable SECS/GEM, GEM300 & E84 Integration for metrology OEM
Achieved 300% faster data transfer with a fast, flexible, and reliable SECS/GEM, GEM300, and E84 integration—delivering improved performance,…
Improving yield at Honeywell’s
By enabling real-time monitoring and predictive maintenance, we reduced scrap, avoided costly upgrades, and transformed operations from reactive…
Help meeting on-time delivery targets at one of the largest OSAT in the world
Enabled on-time delivery at a leading OSAT by achieving full SECS/GEM compliance, doubling productivity, eliminating recipe errors, and…
Related Products and Services
EIStationcontroller
EIStationController acts as a robust Station Controller Development Platform, enabling seamless communication…
Alarm Management System
EIAMS is a powerful Alarm Management System for Semiconductors from einnosys that…
Xpump
xPump – AI-based Predictive Maintenance System AI-powered real-time monitoring for pumps, motors,…
Frequently Asked Questions.
What is EIGEMBox?
EIGEMBox is a plug-and-play SECS/GEM communication hardware and software solution that enables semiconductor or FPD equipment to connect seamlessly with factory host systems.
Which SEMI standards does EIGEMBox support?
EIGEMBox fully supports SEMI E30, E37, E5, and E4 standards, ensuring complete GEM and SECS-II compliance for reliable equipment-to-host communication.
Can EIGEMBox be integrated with older or legacy equipment?
Yes. EIGEMBox is designed to retrofit older tools that do not have built-in SECS/GEM communication, allowing them to meet modern factory automation requirements.
Is EIGEMBox compatible with GEM300 or 300mm equipment?
Yes. EIGEMBox can be configured to support GEM300 communication standards, including SEMI E87, E90, E94, and E116, for 300mm wafer handling systems.
What are the benefits of using EIGEMBox for SECS/GEM communication?
EIGEMBox simplifies integration, accelerates SECS/GEM compliance, reduces development time, and ensures stable and reliable host communication with Tier-1 semiconductor fabs worldwide.
Does eInnoSys provide support and installation services for EIGEMBox?
Yes. eInnoSys provides full implementation, testing, and certification support to ensure your equipment meets SECS/GEM compliance requirements.
Can EIGEMBox connect with OHT, AGV, or RGV systems?
Yes. When combined with E84 I/O modules, EIGEMBox enables communication with material handling systems such as OHT, AGV, and RGV for automated lot delivery.
Does EIGEMBox require any software installation on my equipment?
No. EIGEMBox is fully plug-and-play and requires zero software or hardware installation on the equipment itself. It connects only to the display output (VGA/DVI/HDMI) and optionally to keyboard and mouse ports. The equipment controller is never modified and continues operating exactly as designed, with no firmware updates, drivers, or software agents required.
Will EIGEMBox cause any side effects like slowdowns or crashes on my equipment?
No. EIGEMBox never touches the equipment controller and connects only through external display and input ports. As a result, there are no side effects, crashes, performance impact, timing issues, or interference with normal equipment operation. The tool behaves exactly as it always has.
What types of equipment can EIGEMBox work with?
EIGEMBox works with virtually any semiconductor equipment that has a display output, regardless of manufacturer, age, or operating system. It has been deployed across 80+ tools worldwide, including metrology (KLA, Therma-wave), deposition (ASM, MRC), etch (Plasma-Therm, SPTS), ion implantation (Varian), and material-handling systems (Takatori). Equipment running DOS, Windows 3.1, Linux, Solaris, or proprietary systems is fully supported.
Do I need permission or support from the original equipment manufacturer (OEM)?
No. EIGEMBox requires no OEM licenses, upgrade kits, support contracts, or permissions. This is especially valuable for tools whose manufacturers have merged, been acquired, or no longer exist. You retain full control over integration and deployment, without dependency on OEM.
How long does installation and setup take?
Physical installation takes about hours per tool complexity, involving simple video and optional keyboard/mouse connections. Initial configuration through the EIGEMBox web interface typically takes several hours to 1–2 days, depending on the complexity of the equipment and the data requirements. Most customers begin collecting real-time data and communicating with their MES within days, not months.