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EIGEMBox 3000 SECS/GEM for Old/Legacy Equipment

EIGEMBox-3000 is a unique product that not only enables old/legacy equipment but also makes it “smart” by adding additional capabilities that are not part of the equipment, such as vibration and acoustics analysis Request A Demo

Enabling SECS/GEM capability on your EXISTING EQUIPMENT

Overview

EIGEMBox-3000 is a unique product that extracts data from your existing equipment through screen captures, from external sensors through direct analog/digital I/O, and from wireless sensors through WiFi or Bluetooth using standard industrial protocols such as Modbus, OPC, and MQTT. It seamlessly combines and analyzes data from various data sources and sends both raw and analyzed data to either the factory host, MES, a Cloud server, or take automatic actions on the equipment.

Essentially, EIGEMBox converts your 20thcentury equipment into a 21st-century one!

EIGEMBox 3000 SECS/GEM for Old/Legacy Equipment
Industry 4.0 represents the fourth revolution in manufacturing technology. It combines physical operations with digital technology such as machine learning, Industrial Internet of Things (IIoT), and big data to create a better-connected ecosystem for manufacturing and supply chain management, essentially creating cyberphysical systems. By creating interconnected systems, it allows better collaboration and access among various departments, partner, vendors, products, and customers.
The Industrial Internet of Things (IIoT) is a key aspect of the fourth industrial revolution. It connects sensors and machines to the internet, which enables deeper data analysis using Big Data, Machine Learning (ML), and Deep Learning (DL) technologies.

One of the big challenges for existing factories having equipment that is a few years or decades old is how to retrofit this equipment to enable smart manufacturing without spending a fortune and/or massive manufacturing disruption.

Benefits Of EIGEMBox

SECS/GEM

Enables SECS/GEM, OPC or Modbus communication capabilities on existing equipment

100% Safe

Requires no software or hardware installation on the equipment

Old/Legacy Equipment

Automation

Enables automation capabilities such as data collection & analysis, Fault Detection & Classification (FDC), recipe download, remote start and stop and much more!

Cost-Effective

Improves Yield, OEE, Cycle Time, process and reduces manufacturing cost

Legacy Equipment

Other Benefits

Supports Industry 4.0 and Smart Factory, Takes minutes to setup

Case Study:

One 200mm fab upgraded their plasma-etch equipment to add SECS/GEM capability using EIGEMBox and prevented scrapping of 194 wafers annually.

On average our customers experienced the return on investment (ROI) to be 6 to 8 months.

This is a partial list of equipment that has been upgraded For SECSGEM using EIGEMBox For a complete list Contact Us.

  • Plasma Therm Versaline VLR
  • Plasma Therm Versaline VLN
  • ARTM-2300TK DeTaper with ProFace HMI
  • Varian 3290
  • MRC Eclipse
  • VSR1
  • VSR3
  • Sidea PT-903
  • ASM E2
  • LPE 3061D
  • Electrovert Omniflex OV04
  • Electrovert Omniflex OV06
  • Electrovert Omniflex OV07
  • Electrovert Omniflex OV09
  • Ecipse Star
  • PG300RM
  • Solder Ball Jet
  • PG200RM
  • BCL
  • Hitachi M501AWE/M511AE/U511AE
  • Screen/SD-80BW
  • vacuum drying oven
  • SCREEN scrubber as-2000
  • IMPLANTER - E500
  • RESIST COATING

  • KLA Therma- Wave Opti-probe 5240i (Windows)
  • KLA Therma-Wave Opti-probe 3290DUV (DOS)
  • Rudolph FE VII
  • LH3600 Wafer Mounter
  • ASM E2000
  • LPE 2061
  • Towa Y1
  • ATM-8200
  • XRA-3640
  • keysight-4070
  • Plasma Therm Versaline VLR
  • Cohu-MT9510 XP
  • Shibuya SBM370
  • Keysight 4070
  • DFD641
  • Essemtech
  • BlueM Oven
  • Towa-Y1
  • Trim & form
  • TEL MK8
  • HITACHI M-511AE
  • Rorze vat
  • Lam TCP9400SE
  • STPS Pegasus
  • HANMI Autoline
  • DFRB-1550

EIGEMBOX - Datasheet

For more information and pricing

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