EIChartControl is an out-of-the-box charting application
Data Collection & SPC module that plugs into EIStationController or EIGEMBox seemlessly
EIChartControl is an out-of-the-box charting application specifically designed for semiconductor manufacturing. It provides robust capabilities for plotting real-time data directly from equipment via SECS/GEM, enabling users to visualize and analyze critical process parameters effortlessly.
Real-Time Data Monitoring: EIChartControl allows users to select and monitor various process parameters, defining the collection frequency along with Upper Control Limits (UCL) and Lower Control Limits (LCL) for enhanced process oversight.
Statistical Process Control (SPC): The application offers comprehensive SPC capabilities, calculating essential metrics such as minimum, maximum, average, and 3-sigma values to help ensure process stability and quality.
User-Friendly Visualization: Presenting data in intuitive graphs, EIChartControl makes it easy for users to interpret complex data sets at a glance, facilitating quicker decision-making.
Actionable Alerts: Users can specify actions to be taken in response to out-of-control (OOC) conditions. These actions can include:
- Stopping the feeding of additional wafers into the equipment
- Aborting processing to prevent further issues
- Putting the equipment down for maintenance in the Manufacturing Execution System (MES)
- Placing lots on hold in MES for engineering evaluation
Following features are offered out-of-the box and doesn’t require a single line of code:
Presents a list of parameters for the connected equipment and lets the user choose name and frequency
Plots real-time data arriving from the equipment in a line chart/trend
Allows users to specify limits (Upper / Lower) and displays those on the graph
Users can specify what actions to take upon violation of those limits and EIChartControl takes those actions through EIChartControl
Works seamlessly with EIChartControl