BENEFITS OF EIAMS:
Allows users to define what actions need to be taken in response to an alarm generated from equipment and takes those actions automatically. Actions can be any combination of -
Stop feeding more wafers into the equipment
Notify appropriate factory personnel
Put the equipment in unscheduled or scheduled maintenance
Hold wafers for engineering evaluation before moving to the next step
Stop processing immediately
Other custom actions
Logs all alarms and compare alarms from one equipment to that of others of the same type
Pareto alarms to help focus on alarms that are most frequently occurring
Case Studies
Prevented misprocessing of 160 wafers/qtr
Reduced equipment downtime by 10%
Improved cycle time by 7%
