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OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE

Developing controller/GUI software for multiple wafer processing, metrology and laser scribe equipment

Development of software for multichamber, cluster equipment with multiple load ports and transport module

Experience developing software for high‐vac equipment with load lock and transport module

First company in the industry to develop entire plasma etch equipment software entirely from scratch in Android, with SECS/GEM

PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE PORTFOLIO

Controller/GUI Software
Controller/GUI Software

Multi-‐chamber plasma etch equipment with multiple load ports and a transport module

Metrology equipment software to measure stress in the thin-‐film based on topography of the wafer

Laser scribe equipment

For more information and pricing