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SEMI Standards

Using SEMI Standards to Improve Smart Manufacturing and Factory Automation

SEMI Standards are voluntary technical agreements between customers and suppliers, designed to enhance product quality, reliability, and affordability. They ensure the interoperability and compatibility of goods and services across industries. SEMI standards, published in the 16-volume SEMI International Standards set, include guidelines, specifications, and practices that cover a wide range of semiconductor manufacturing and photovoltaic processes.

These standards address key areas such as equipment automation (hardware and software), 3D-IC, high-brightness LEDs, materials, packaging, traceability, and flat-panel displays. SEMI, a global industry association, supports the manufacturing supply chain in the semiconductor, photovoltaics (PV), electronics, and high-tech industries through the continuous evolution of SEMI Standards, fostering innovation and operational efficiency.

SEMI Standards For Equipment

SEMI E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E4 – Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 – Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services

SEMI E95 – Specification for Human Interface for Semiconductor Manufacturing Equipment

SEMI E4 SECS-I - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E37 HSMS - Specification for High-Speed SECS Message Services (HSMS) Generic Services

SEMI E5 SECS-II - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object

SEMI E157 - Specification for Module Process Tracking

SEMI E116 - Specification for Equipment Performance Tracking

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