Successfully implemented on 80+ Equipment's
Patented Plug & Play SECS/GEM Solutions for Legacy Equipment
Solution Overview
EIGEMBox is a plug-and-play solution that adds SECS/GEM, Modbus, or OPC capability to legacy semiconductor equipment—without any software or hardware installation on the tool itself. By simply connecting the equipment’s display cable (VGA, DVI, or HDMI) and optionally the keyboard/mouse ports (USB or PS/2), EIGEMBox enables full host communication and remote control. It has been successfully used in various scenarios, including enhancing SECS/GEM communication with full parameter exchange and reduced latency, enabling AMHS (E84/E87) integration in 200MM fabs, and extracting non-standard data beyond traditional SECS/GEM limitations to support advanced monitoring and automation.
Enhancing SECS/GEM Communication
EIGEMBox enhanced SECS/GEM communication by enabling full parameter exchange, reducing latency, and improving automation efficiency on legacy semiconductor equipment.
AMHS Integration in 200MM Fab
EIGEMBox enabled E84/E87 protocol support for 200MM Fab tools, allowing seamless AMHS integration and reducing manual material handling for improved efficiency and throughput.
Advanced SECS/GEM Data Extraction with EIGEMBox
EIGEMBox enables the extraction of additional, non-standard data from semiconductor equipment, enhancing SECS/GEM communication and providing richer insights for better monitoring and process control.
Benefits Of EIGEMBox
SECS/GEM
Enables SECS/GEM, OPC or Modbus communication capabilities on existing equipment
100% Safe
Requires no software or hardware installation on the equipment
Automation
Enables automation capabilities such as data collection & analysis, Fault Detection & Classification (FDC), recipe download, remote start and stop and much more!
Cost-Effective
Improves Yield, OEE, Cycle Time, process and reduces manufacturing cost
Trusted By
Our solutions ensure no side effects such as machine lock-ups or slowdowns, maintaining optimal performance and reliability.
Case Study:
One 200mm fab upgraded their plasma-etch equipment to add SECS/GEM capability using EIGEMBox and prevented scrapping of 194 wafers annually.
Features of EIGEMBox
Enable SECS/GEM capability on existing equipment regardless of generation, make, model, OS or anything
No hardware or software installation required on the equipment- Plug-n-Play, takes minutes to setup
Plug-n-Play takes minutes to setup
- KLA Surfscan
- Varian 3290
- Takatori
- Ebara
- Plasma Therm
- MRC Eclipse
- KLA Therma-wave
- Sidea PT-903
- CDE Resmap
- Accretech PG300RM
- TEL Alpha 8 SE
- ASM E2000
- SPTS
- Hitachi M-511AE
- Disco 651/641
- Blue M Oven
- Towa Y1
- Asterion
- Budatec
- Orthodyne
- Essentec Fox & Paraguda
- Takatori ATM 8200A
- ASM AD898
- Ismeca SL
- Hexa Max
- Centrotherm CP6202
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FAQ’s
What is EIGEMBox?
EIGEMBox is a plug-and-play SECS/GEM communication hardware and software solution that enables any semiconductor or FPD equipment to connect seamlessly with factory host systems.
EIGEMBox Which SEMI standards does EIGEMBox support?
EIGEMBox fully supports SEMI E30, E37, E5, and E4, ensuring complete GEM and SECS-II compliance for reliable equipment-to-host communication.
Can EIGEMBox be integrated with older or legacy equipment?
Yes. EIGEMBox is designed to retrofit older tools that lack built-in SECS/GEM communication, allowing them to meet modern factory automation requirements.
Is EIGEMBox compatible with GEM300 or 300mm equipment?
Yes, EIGEMBox can be configured to support GEM300 communication standards (SEMI E87, E90, E94, and E116) for 300mm wafer handling systems.
What are the benefits of using EIGEMBox for SECS/GEM communication?
It simplifies integration, accelerates SECS/GEM compliance, reduces development time, and ensures stable host communication with Tier-1 fabs worldwide.
Does eInnoSys provide support and installation services for EIGEMBox?
Yes, eInnoSys offers full implementation, testing, and certification support to ensure your equipment passes SECS/GEM compliance requirements.
Can EIGEMBox connect with OHT, AGV, or RGV systems?
Yes. When combined with E84 I/O modules, EIGEMBox enables communication with material handling systems like OHT, AGV, or RGV for automated lot delivery.