Successfully implemented on 70+ Equipments
Patented Plug & Play SECS/GEM Solutions for Legacy Equipment
Solution Overview
EIGEMBox is a plug-and-play solution that adds SECS/GEM, Modbus, or OPC capability to legacy semiconductor equipment—without any software or hardware installation on the tool itself. By simply connecting the equipment’s display cable (VGA, DVI, or HDMI) and optionally the keyboard/mouse ports (USB or PS/2), EIGEMBox enables full host communication and remote control. It has been successfully used in various scenarios, including enhancing SECS/GEM communication with full parameter exchange and reduced latency, enabling AMHS (E84/E87) integration in 200MM fabs, and extracting non-standard data beyond traditional SECS/GEM limitations to support advanced monitoring and automation.
Enhancing SECS/GEM Communication
EIGEMBox enhanced SECS/GEM communication by enabling full parameter exchange, reducing latency, and improving automation efficiency on legacy semiconductor equipment.
AMHS Integration in 200MM Fab
EIGEMBox enabled E84/E87 protocol support for 200MM Fab tools, allowing seamless AMHS integration and reducing manual material handling for improved efficiency and throughput.
Advanced SECS/GEM Data Extraction with EIGEMBox
EIGEMBox enables the extraction of additional, non-standard data from semiconductor equipment, enhancing SECS/GEM communication and providing richer insights for better monitoring and process control.
Benefits Of EIGEMBox
SECS/GEM
Enables SECS/GEM, OPC or Modbus communication capabilities on existing equipment
100% Safe
Requires no software or hardware installation on the equipment
Automation
Enables automation capabilities such as data collection & analysis, Fault Detection & Classification (FDC), recipe download, remote start and stop and much more!
Cost-Effective
Improves Yield, OEE, Cycle Time, process and reduces manufacturing cost
Trusted By
Our solutions ensure no side effects such as machine lock-ups or slowdowns, maintaining optimal performance and reliability.
Case Study:
One 200mm fab upgraded their plasma-etch equipment to add SECS/GEM capability using EIGEMBox and prevented scrapping of 194 wafers annually.
Features of EIGEMBox
Enable SECS/GEM capability on existing equipment regardless of generation, make, model, OS or anything
No hardware or software installation required on the equipment- Plug-n-Play, takes minutes to setup
Plug-n-Play takes minutes to setup
- KLA Surfscan
- Varian 3290
- Takatori
- Ebara
- Plasma Therm
- MRC Eclipse
- KLA Therma-wave
- Sidea PT-903
- CDE Resmap
- Accretech PG300RM
- TEL Alpha 8 SE
- ASM E2000
- SPTS
- Hitachi M-511AE
- Disco 651/641
- Blue M Oven
- Towa Y1
- Asterion
- Budatec
- Orthodyne
- Essentec Fox & Paraguda
- Takatori ATM 8200A
- ASM AD898
- Ismeca SL
- Hexa Max
- Centrotherm CP6202
Various EIGEMBox Models Offered by Us
EIGEMBox-2000 is a unique product that enables SECS/GEM, Modbus, or OPC capability on your existing equipment, and it does it without requiring any software or hardware installation…
EIGEMBox-3000 Contains all the Functionalities of EIGEMBOX-2000.
EIGEMBox-3000 is a unique product that not only enables old/legacy equipment but also makes it “smart” by adding additional capabilities that are not part of the equipment, such as vibration and acoustics analysis.
Integration of E84/E87 Protocols for Legacy Equipment Using EIGEMBox 4000
EIGEMBox 4000 revolutionizes legacy semiconductor tools by enabling E84/E87 protocol functionality without expensive hardware modifications. This plug-and-play solution integrates real-time image recognition and advanced SECS/GEM communication to facilitate seamless interaction between legacy equipment and Automated Material Handling Systems (AMHS). Enhance efficiency, reduce costs, and extend the life of your capital assets effortlessly.
Related Products and Services
FAQs of EIGEMBox
Q1: What is EIGEMBox?
A1: EIGEMBox is a plug-n-play solution that enables SECS/GEM communication for semiconductor equipment, allowing seamless data collection and equipment control.
Q2: How does EIGEMBox work?
A2: EIGEMBox captures data directly from equipment screens and sends it to the Factory Host/MES via SECS/GEM protocols.
Q3: What are the main features of EIGEMBox?
A3: Key features include real-time data collection, easy integration, and support for various SECS/GEM commands.
Q4: What types of equipment are compatible with EIGEMBox?
A4: EIGEMBox is compatible with most semiconductor manufacturing equipment that supports SECS/GEM standards.
Q5: How can I integrate EIGEMBox into my existing setup?
A5: Integration is simple. Connect EIGEMBox to your equipment, configure the settings, and it’s ready to communicate with your MES.