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EIGEMBox 2000 – SECS/GEM for Old/Legacy Equipment

EIGEMBox-2000 is a unique hardware product equipped with required software that enables SECS/GEM capability on equipment that currently doesn’t have one Request A Demo

Enabling SECS/GEM capability on your EXISTING EQUIPMENT

Overview

EIGEMBox-2000 is a unique product that enables SECS/GEM, Modbus, or OPC capability on your existing equipment, and it does it without requiring any software or hardware installation on the equipment. All you need is to connect the cable from your equipment’s PC to EIGEMBox. If you want to control the equipment for recipe selection/download or remote start and stop or setting any set-points, you need to connect EIGEMBox to the equipment PC through keyboard and mouse ports (USB or PS/2) as well. That’s it!
EIGEMBox 2000 - SECS/GEM for Old/Legacy Equipment
The legacy equipment can be from any manufacturer or model, could be running any Operating System, or can be a process, inspection, or metrology equipment, it wouldn’t matter! The best part is this product doesn’t require any hardware or software to be installed on your existing legacy equipment, so you can be assured that EIGEMBox-2000 can not affect the reliability or performance of your legacy equipment. Communication is enabled through HSMS or SECS-I port.

In addition to SECS/GEM, data from legacy equipment can also be sent through OPC or Modbus TCP.

Benefits Of EIGEMBox

SECS/GEM

Enables SECS/GEM, OPC or Modbus communication capabilities on existing equipment

100% Safe

Requires no software or hardware installation on the equipment

Old/Legacy Equipment

Automation

Enables automation capabilities such as data collection & analysis, Fault Detection & Classification (FDC), recipe download remote start and stop and much more!

Cost-Effective

Improves Yield, OEE, Cycle Time, process and reduces manufacturing cost

Legacy Equipment

Other Benefits

Supports Industry 4.0 and Smart Factory, Takes minutes to setup

Case Study:

One 200mm fab upgraded their plasma-etch equipment to add SECS/GEM capability using EIGEMBox and prevented scrapping of 194 wafers annually.

On average our customers experienced the return on investment (ROI) to be 6 to 8 months.

Features of EIGEMBox

Eigembox Equipment

Enable SECS/GEM capability on existing equipment regardless of generation, make, model, OS or anything

EIGEMBox icon

No hardware or software installation required on the equipment- Plug-n-Play, takes minutes to setup

SECS/GEM for Old/Legacy Equipment

Plug-n-Play takes minutes to setup

This is a partial list of equipment that has been upgraded For SECSGEM using EIGEMBox For a complete list Contact Us.

  • Plasma Therm Versaline VLR
  • Plasma Therm Versaline VLN
  • ARTM-2300TK DeTaper with ProFace HMI
  • Varian 3290
  • MRC Eclipse
  • VSR1
  • VSR3
  • Sidea PT-903
  • ASM E2
  • LPE 3061D
  • Electrovert Omniflex OV04
  • Electrovert Omniflex OV06
  • Electrovert Omniflex OV07
  • Electrovert Omniflex OV09
  • Ecipse Star
  • PG300RM
  • Solder Ball Jet
  • PG200RM
  • BCL
  • Hitachi M501AWE/M511AE/U511AE
  • Screen/SD-80BW
  • vacuum drying oven
  • SCREEN scrubber as-2000
  • IMPLANTER - E500
  • RESIST COATING

  • KLA Therma- Wave Opti-probe 5240i (Windows)
  • KLA Therma-Wave Opti-probe 3290DUV (DOS)
  • Rudolph FE VII
  • LH3600 Wafer Mounter
  • ASM E2000
  • LPE 2061
  • Towa Y1
  • ATM-8200
  • XRA-3640
  • keysight-4070
  • Plasma Therm Versaline VLR
  • Cohu-MT9510 XP
  • Shibuya SBM370
  • Keysight 4070
  • DFD641
  • Essemtech
  • BlueM Oven
  • Towa-Y1
  • Trim & form
  • TEL MK8
  • HITACHI M-511AE
  • Rorze vat
  • Lam TCP9400SE
  • STPS Pegasus
  • HANMI Autoline
  • DFRB-1550

EIGEMBOX - Datasheet

For more information and pricing

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